극초고진공용 ion pump
챔버
극자외선분광기
입출력유니트

진공이온펌프

Standard Type

Double-Ended Type

-Ultra High Vacuum ion pump
-Baking unit (option)

-Addtional port for NEG module
 TSP and etc.

20 ℓ/s

VIP-20

180 ℓ/s

VIP-DE-180

30 ℓ/s

VIP-30

240 ℓ/s

VIP-DE-240 D

60 ℓ/s

VIP-60

VIP-DE-240 S

120 ℓ/s

VIP-120

300 ℓ/s

VIP-DE-300

180 ℓ/s

VIP-180

360 ℓ/s

VIP-DE-360

240 ℓ/s

VIP-240 D

480 ℓ/s

VIP-DE-480

VIP-240 S

600 ℓ/s

VIP-DE-600

300 ℓ/s

VIP-300

   

360 ℓ/s

VIP-360

   

480 ℓ/s

VIP-480

   

600 ℓ/s

VIP-600

   

*Default : Deep Type
*Shallw Type is Option

D type :
S type :

D type :
S type :

제어기

 

고전압케이블

VIPC-1000

1port, 5600V, 100mA

VIPC-4200

2port, 7000V, 5600V, 500mA/100mA

 

3m, 5m, 10m, 15m, 20m

Other Length : option