극초고진공용 ion pump
챔버
극자외선분광기
입출력유니트
 
 

진공이온펌프

 

무소음, 무진동, 저전력, 고효율
초고진공 영역에서 우수한 가동
단시간 내에 초고진공 영역까지 배기

 
Model VIP-20 VIP-30 VIP-60 VIP-120 VIP-150

Pumping speed(ℓ/s)

20 30 60 120 150

Starting Pressure

1.0 x10E-3 Torr

Ultimate Pressure

Below10E-11 Torr

Dimension(WxDxF)(mm)

216x110x150 214x121x198 321x138x238 433x234x282 433x234x352

Pumping port size

2.75"(CF35) 2.75"(CF35) 6 "(CF100) 8"(CF160) 8"(CF160)

Intermal Volume(ℓ)

0.8 1.3 4 9 13
Maximum Baking Temperature 350 ℃

Weight(kg)

8 14 17 39 49

Heater Plate

Volt(V) - 220
Power(W) - 110 150

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Model VIP-240 VIP-300 VIP-360 VIP-480 VIP-600
D S

Pumping speed(ℓ/s)

240 300 360 480 600

Starting Pressure

1.0 x10E-3 Torr

Ultimate Pressure

Below10E-11 Torr

Dimension(WxDxF)(mm)

433x234x422 433x343x313 433x367x352 433x273x446 433x367x422 433x367x492

Pumping port size

8"(CF160) 8"(CF160) 8"(CF160) 8"(CF160) 8"(CF160)

Intermal Volume(ℓ)

17 22 22 29 35

Maximum BakingTemperature

350 ℃

Weight(kg)

60 72 92 105
Heater Plate Volt(V) 220
POWER(W) 200 350 400 500

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