극초고진공용 ion pump
챔버
극자외선분광기
입출력유니트
 
 

진공이온펌프

 

무소음, 무진동, 저전력, 고효율
초고진공 영역에서 우수한 가동
단시간 내에 초고진공 영역까지 배기


Model VIP-150 VIP-240 VIP-300 VIP-360
D S

Pumping speed(ℓ/s)

150 240 300 360

Starting Pressure

1.0 x10E-3 Torr

Ultimate Pressure

Below10E-11 Torr

Dimension(WxDxF)(mm)

433x234x387 433x234x457 433x343x348 433x367x387 433x273x481

Pumping port size

8"(CF160) 8"(CF160) 8"(CF160) 8"(CF160)

Intermal Volume(ℓ)

14 18 23 23

Maximum BakingTemperature

350 ℃

Weight(kg)

60 72 85 85

Heater Plate

Volt(V) 220
Power(W) (150)180 200 350 350

Download

Model VIP-480 VIP-600

Pumping speed(ℓ/s)

480 600

Starting Pressure

1.0 x10E-3 Torr

Ultimate Pressure

Below10E-11 Torr

Dimension(WxDxF)(mm)

433x367x457 433x367x527

Pumping port size

8"(CF160) 8"(CF160)

Intermal Volume(ℓ)

30 35

Maximum BakingTemperature

350 ℃

Weight(kg)

92 105

Heater Plate

Volt(V) 220
Power(W) 400 500

Download